Subjects for Research

We aim at realization of mechanisms with perfect 6-Degree-of-Freedom motions.



To realize ultra-precise measurement machine and machine tool, stiff and accurately moving mechanism is needed. Actually, it is so difficult to keep the relative position between the workpiece and the end-effector because of positioning and motion errors of the mechanism, and thermal fluctuation. We are trying to realize the mechanism with perfect 6-degree-of-freedom (6-DOF) motions by adopting some basic principles of precision mechanism, and using proper advanced measurement and control technologies.

Current Subjects

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List of Publications
Current Research Topics (456kB PDF file )(2014)

Ultra-precise Machine System
with 6-DOF Perfect Motion between Tool and Workpiece

2004--

PARALELL CMM

(Advanced Coordinate Measuring Machine)
1995--

Accuracy Improvement of Parallel Kinematic Machine

1996--

Laser-interferometric Length Measurement Tracking System

2017--

High-speed High-resolution Linear Micro Stepper
Based on Toggle Mechanism(Inchworm Mechanism)

2011`

Friction control based on ultrasonic oscillation
for rolling element linear motion guide

for High-Speed Precise Positioning
2004--

3D Touch Probe with High sensitivity

1998--


Previous Works

Positioning-repeatability improvement of kinematic coupling
based on ultrasonic vibration

2011`2014

Digital Displacement Sensor Based on Surface Acoustic Wave

2011`2014

Friction reduction and lubricity improvement
for meshed gears based on ultrasonic oscillation

2009`2011

Active Air Bearing using Ultrasonic Actuator

1995-2008

Shape Optimization for Flexure Hinge and Torsional Hinge

1995-1999

High-rigidity multi-degree-of-freedom fine motion mechanism using piezoelectric actuators

1991-1995

Study on In-process Measurement for Gear Eccentricity

1999

Study on stiffness improvement for bolted joint structure

1995-1999

Optimum shape design for sliding surface of beam subjected to moving load

1996-1997

Study on Microelectromechanical System

1992-1993

Development of workpiece support system using steel balls

1987-1993

Spatial coordinate measurement using structured laser light and spherical mirror

1991-1993



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