Active Air Bearing using Squeeze Film
Generated by Ultrasonic Oscillation

Summary

This study proposes an active air bearing based on squeeze film using ultrasonic actuator. The squeeze film generated by the oscillating actuators lifts and positions actively the floating object. Experimental results showed that the ultrasonic oscillation eliminated residual vibration of the object, and the ultrasonic actuator lifted and positioned the object simultaneously.

This photo is an experimental air bearing using Resonator with Directional Converter.
Axial posisioning and runout compensation have been performed with PI feedback control.
Axial repeatable run-out (RRO) was decreased from 232nm(p-p) to 118 nm(p-p).
Axial nonrepeatabale runout (NRRO) was 30-60 nm (3 sigma).
Radial RRO was decreaded from 1030 nm(p-p) to 957 nm(p-p) .
Radial NRRO was 60-80 nm (3 sigma).

This is an experimental linear rectangular air guideway based on ultrasonic oscillation.
The films on eight bearing surfaces of a horn, which is a stator, lift and guide the carriage. Moreover, the oscillation that modulates the amplitude via the positioning signal varies the thickness of the air film. Thus, this bearing regulates the position of the carriage in z direction using a PI conroller with a displacement sensor sot that its motion error becomes zero.

Papers

Takaaki Oiwa and Ryosuke Suzuki:
Linear Rectangular Air Bearing Based on Squeeze Film Generated by Ultrasonic Oscillation,
Review of Scientific Instruments, 76, 7 (2005) 075101pp.1-7.

Takaaki Oiwa and Masaya Kato:
Squeeze air bearing based on ultrasonic oscillation : motion error compensation using amplitude modulation,
Review of Scientific Instruments, 75, 11(2004) pp. 4615-4620.

Proceedings

Takaaki OIWA and Masaya Kato:
Active Air Bearing based on Ultrasonic Oscllation (5 th report)
-Experimental Air Bearing using Resonator with Directional Converter-
The 15th Symposium on Electoromagnetic and Dynamics,
(2003)529-534.

Takaaki OIWA, Hiroyuki Tanaka and Makoto Ichimura:
Active Air Bearing using Ultrasonic Oscillation,
-Experimental Air Bearing with Cone-shaped Oscillator-
Mechanical Engineering Congress, 2001 Japan( MECJ-01),
Vol. 3,丆(2001) 8/30丆251-252( In japanese )

Takaaki OIWA and Kenji Nohara:
Active Air Bearing using Ultrasonic Oscillation
- Precision Positioning based on Amplitude Modulation-
Proc. The 13th Symposium on Electromagnetics and Dynamics
(2001) 6/22丆731-732( In japanese ).

Takaaki OIWA, Shigeru MATSUDA and Takashi MATSUDA
Active Air Bearing using Squeeze Film
Proc. 75th Conf.Jpn. Soc. Mech. Eng (IV), (1998) 250-251.( In japanese )

Active Air Bearing using Squeeze Film Generated by Ultrasonic Oscillation

Summary

Papers

Takaaki Oiwa and Ryosuke Suzuki: Linear Rectangular Air Bearing Based on Squeeze Film Generated by Ultrasonic Oscillation, Review of Scientific Instruments, 76, 7 (2005) 075101pp.1-7.

Takaaki Oiwa and Masaya Kato: Squeeze air bearing based on ultrasonic oscillation : motion error compensation using amplitude modulation, Review of Scientific Instruments, 75, 11(2004) pp. 4615-4620.

Proceedings

Takaaki OIWA and Masaya Kato: Active Air Bearing based on Ultrasonic Oscllation (5 th report) -Experimental Air Bearing using Resonator with Directional Converter- The 15th Symposium on Electoromagnetic and Dynamics, (2003)529-534.

Takaaki OIWA, Hiroyuki Tanaka and Makoto Ichimura: Active Air Bearing using Ultrasonic Oscillation, -Experimental Air Bearing with Cone-shaped Oscillator- Mechanical Engineering Congress, 2001 Japan( MECJ-01), Vol. 3,丆(2001) 8/30丆251-252( In japanese )

Takaaki OIWA and Kenji Nohara: Active Air Bearing using Ultrasonic Oscillation - Precision Positioning based on Amplitude Modulation- Proc. The 13th Symposium on Electromagnetics and Dynamics (2001) 6/22丆731-732( In japanese ).

Takaaki OIWA, Shigeru MATSUDA and Takashi MATSUDAActive Air Bearing using Squeeze Film Proc. 75th Conf.Jpn. Soc. Mech. Eng (IV), (1998) 250-251.( In japanese )