6-DOF Fine Motion Stage using PZT Actuators

Optimum Link Layout Design

This paper describes a link layout design problem for six degree-of-freedom fine motion stage using Stewart platform mechanism. Isotropies of the translational and rotational stiffness, the generated force of the stage, the force acting on the link and the positioning resolution are investigated by singular value decomposition in various link layout. The obtained main results are as follows. (1) The translational stage stiffness in XYZ directions is unified at optimum stage height. The height is dependent on position angle difference between the stage joint and the base joint and is independent of the stage radius. (2) The translational positioning resolution, the generated force of the stage and the force acting on the link are unified with optimum stage radius, when the angle between the links and the base plane is 35.23 degree. (3) Optimum relation between the stage height and the stage radius exists to make the rotational stiffness in abg directions equal, when the angle between the links and the base plane is 54.7degree (4) The link layout which unifies simultaneously the translational stiffness and the rotational stiffness has not been found.

This is a six-degree-of-freedom fine motion stage using six PZT actuators. This machanism was made by OIWA Lab.

References

Papers

Takaaki OIWA
Error Compensation System for Joints, Links and Mechine Frame of Parallel Kinematics Machines
International Journal of Robotics Research, Vol. 24, No. 12 (2005), pp. 1087-1102.

Takaaki OIWA and Masato TAMAKI
A Study on Abbe's Principle of Six Degree-of-Freedom Parallel Mechanism
(Effect of Joint Runout on Motion Error of Mechanism)
Trans Jpn Soc. Mechanical Engineers, Vol. 69, No. 678 (2003) pp.472-477(in Japanese).

Takaaki OIWA and Takeshi OOTAWA
Six-Degree-of-Freedom Fine Motion Mechanism using Parallel Mechanism (2nd Report)
-Performance Test-
J.JSPE, Vol. 66, No. 2 (2000) pp277-281 (in Japanese).

Takaaki OIWA and Masakazu HIRANO
Six-Degree-of-Freedom Fine Motion Mechanism using Parallel Mechanism
-Link Layout Design-
J. JSPE, Vo. 65, No. 10 (1999) pp1425-1429 (in Japanese).

Proceedings

Takaaki OIWA and Masato TAMAKI
Study on ABBE'S principle in parallel kinematics,
Proc. 2nd Chemnitz Parallel Kinemtics Seminar, (2000) 345-352.

6-DOF Fine Motion Stage using PZT Actuators

Optimum Link Layout Design

References

Papers

Takaaki OIWA Error Compensation System for Joints, Links and Mechine Frame of Parallel Kinematics Machines International Journal of Robotics Research, Vol. 24, No. 12 (2005), pp. 1087-1102.

Takaaki OIWA and Masato TAMAKI A Study on Abbe's Principle of Six Degree-of-Freedom Parallel Mechanism (Effect of Joint Runout on Motion Error of Mechanism) Trans Jpn Soc. Mechanical Engineers, Vol. 69, No. 678 (2003) pp.472-477(in Japanese).

Takaaki OIWA and Takeshi OOTAWA Six-Degree-of-Freedom Fine Motion Mechanism using Parallel Mechanism (2nd Report) -Performance Test-J.JSPE, Vol. 66, No. 2 (2000) pp277-281 (in Japanese).

Takaaki OIWA and Masakazu HIRANO Six-Degree-of-Freedom Fine Motion Mechanism using Parallel Mechanism -Link Layout Design-J. JSPE, Vo. 65, No. 10 (1999) pp1425-1429 (in Japanese).