Journal of the Japan Cociety for Precision Engineerig, Vol.66, No. 2 (2000) 277-281.
Six Degree-of-Freedom Fine Motion Mechanism using Parallel Mechanism (2nd Report)
-Performance Test-
Takaaki OIWA and Takeshi OOTAWA
Abstract
This study proposes a six-degree-of-freedom fine motion mechanism with isotropic stiffness and positioning resolution in XYZ directions. In the previous report, the optimum link layouts with the above characteristics have been designed by the singular value decomposition. In this paper, construction and experimental results have been described for the designed parallel mechanism. The stiffness values in translational directions and in alpha-beta directions became equal. The stiffness value in gamma direction, moreover, was two times those in alpha-beta directions. The maximum movements of the stage were 10 micro-meter in XYZ directions, 200 micro-rad in alpha-beta directions and 100 micro-rad in gamma direction. The positioning errors and the motion errors were less than 0.16 micro-meter and 2.0 micro-rad. The dynamic characteristics in six directions were equal under 1-50Hz frequency range.
Key words
six degree-of-freedom mechanism, fine motion stage, link layout design, Stewart platform, parallel mechanism