Subjects for Research

We aim at realization of mechanisms with perfect 6-Degree-of-Freedom motions.

To realize ultra-precise measurement machine and machine tool, stiff and accurately moving mechanism is needed. Actually, it is so difficult to keep the relative position between the workpiece and the end-effector because of positioning and motion errors of the mechanism, and thermal fluctuation. We are trying to realize the mechanism with perfect 6-degree-of-freedom (6-DOF) motions by adopting some basic principles of precision mechanism, and using proper advanced measurement and control technologies.

Current Subjects

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List of Publications
Current Research Topics (456kB PDF file )(2014)

	Ultra-precise Machine System with 6-DOF Perfect Motion between Tool and Workpiece	2004--
	PARALELL CMM (Advanced Coordinate Measuring Machine)	1995--
	Accuracy Improvement of Parallel Kinematic Machine	1996--
	Laser-interferometric Length Measurement Tracking System	2017--
	High-speed High-resolution Linear Micro Stepper Based on Toggle Mechanism(Inchworm Mechanism)	2011�`
	Friction control based on ultrasonic oscillation for rolling element linear motion guide for High-Speed Precise Positioning	2004--
	3D Touch Probe with High sensitivity	1998--

Previous Works

Positioning-repeatability improvement of kinematic coupling based on ultrasonic vibration	2011�`2014
Digital Displacement Sensor Based on Surface Acoustic Wave	2011�`2014
Friction reduction and lubricity improvement for meshed gears based on ultrasonic oscillation	2009�`2011
Active Air Bearing using Ultrasonic Actuator	1995-2008
Shape Optimization for Flexure Hinge and Torsional Hinge	1995-1999
High-rigidity multi-degree-of-freedom fine motion mechanism using piezoelectric actuators	1991-1995
Study on In-process Measurement for Gear Eccentricity	1999
Study on stiffness improvement for bolted joint structure	1995-1999
Optimum shape design for sliding surface of beam subjected to moving load	1996-1997
Study on Microelectromechanical System	1992-1993
Development of workpiece support system using steel balls	1987-1993
Spatial coordinate measurement using structured laser light and spherical mirror	1991-1993