Journal of the Japan Cociety for Precision Engineerig, Vol.66, No. 2 (2000) 277-281.
Six Degree-of-Freedom Fine Motion Mechanism using Parallel Mechanism (2nd Report)
-Performance Test-
Takaaki OIWA and Takeshi OOTAWA
Abstract
This study proposes a six-degree-of-freedom fine motion mechanism with isotropic stiffness and positioning resolution in XYZ directions. In the previous report, the optimum link layouts with the above characteristics have been designed by the singular value decomposition. In this paper, construction and experimental results have been described for the designed parallel mechanism. The stiffness values in translational directions and in ab directions became equal. The stiffness value in g direction, moreover, was two times those in ab directions. The maximum movements of the stage were 10ｵm in XYZ directions, 200ｵrad in ab directions and 100ｵrad in g direction. The positioning errors and the motion errors were less than ｱ0.08ｵm and ｱ1.0ｵrad. The dynamic characteristics in six directions were equal under 1-50Hz frequency range.
Key words: six degree-of-freedom mechanism, fine motion stage, link layout design, Stewart platform, parallel mechanism
精密工学会誌，66巻2号（2000） 277-281.
パラレルメカニズムを用いた６自由度精密運動機構（続報）
―試作機の性能評価―
大岩 孝彰，大多和 毅
Abstract
並進方向の剛性と位置決め分解能が等しくなるリンク配置を持つ表記メカニズムを試作し，その性能評価を行った．その結果，ＸＹＺ方向の静剛性および動剛性はそれぞれ等しくなった．積層型圧電素子をアクチュエータとして駆動した結果，駆動周波数50Hzまでの各方向への動特性が等しいこと，十分な位置決め精度と運動精度を有していることがわかった．