Journal of the Japan Cociety for Precision Engineerig, Vol.65, No. 10 (1999) 1425-1429.
Six Degree-of-Freedom Fine Motion Mechanism using Parallel Mechanism
-Link Layout Design-
Takaaki OIWA and Masakazu HIRANO
Abstract
This paper describes a link layout design problem for six degree-of-freedom fine motion stage using Stewart platform mechanism. Isotropies of the translational and rotational stiffness, the generated force of the stage, the force acting on the link and the positioning resolution are investigated by singular value decomposition in various link layout. The obtained main results are as follows. (1) The translational stage stiffness in XYZ directions is unified at optimum stage height. The height is dependent on position angle difference between the stage joint and the base joint and is independent of the stage radius. (2) The translational positioning resolution, the generated force of the stage and the force acting on the link are unified with optimum stage radius, when the angle between the links and the base plane is 35.23 degree (3) Optimum relation between the stage height and the stage radius exists to make the rotational stiffness in abg directions equal, when the angle between the links and the base plane is 54.7 degree (4) The link layout which unifies simultaneously the translational stiffness and the rotational stiffness has not been found.
Key words: six degree-of-freedom mechanism, fine motion stage, link layout design, Stewart platform, parallel mechanism
精密工学会誌，65巻10号（1999） 1425-1429.
パラレルメカニズムを用いた６自由度精密運動機構*
―リンク配置の検討―
大 岩 孝 彰** 平 野 正 和***
Abstract
精密な機構に適した６自由度パラレルメカニズムのリンク配置を求めるため，微小運動学による特異値解析を行った．その結果，ステージの並進方向の剛性と並進方向の位置決め分解能を等方化するためのリンク配置および回転方向の剛性と位置決め分解能を等方化するリンク配置が求められた．並進方向と回転方向の剛性や特性を同時に等方化するリンク配置は得られなかった．